JPH0128676Y2 - - Google Patents

Info

Publication number
JPH0128676Y2
JPH0128676Y2 JP1985028788U JP2878885U JPH0128676Y2 JP H0128676 Y2 JPH0128676 Y2 JP H0128676Y2 JP 1985028788 U JP1985028788 U JP 1985028788U JP 2878885 U JP2878885 U JP 2878885U JP H0128676 Y2 JPH0128676 Y2 JP H0128676Y2
Authority
JP
Japan
Prior art keywords
substrate
support
support rod
pair
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985028788U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61144637U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985028788U priority Critical patent/JPH0128676Y2/ja
Publication of JPS61144637U publication Critical patent/JPS61144637U/ja
Application granted granted Critical
Publication of JPH0128676Y2 publication Critical patent/JPH0128676Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Weting (AREA)
JP1985028788U 1985-02-28 1985-02-28 Expired JPH0128676Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985028788U JPH0128676Y2 (en]) 1985-02-28 1985-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985028788U JPH0128676Y2 (en]) 1985-02-28 1985-02-28

Publications (2)

Publication Number Publication Date
JPS61144637U JPS61144637U (en]) 1986-09-06
JPH0128676Y2 true JPH0128676Y2 (en]) 1989-08-31

Family

ID=30526996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985028788U Expired JPH0128676Y2 (en]) 1985-02-28 1985-02-28

Country Status (1)

Country Link
JP (1) JPH0128676Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0620063B2 (ja) * 1986-12-12 1994-03-16 株式会社東芝 半導体基板の洗浄装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111320A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd スピンナ

Also Published As

Publication number Publication date
JPS61144637U (en]) 1986-09-06

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